关于SiC/SiO2 XPS测试中Si2p峰的解析，要不要考虑自旋轨道耦合分裂缝?最近也在被这个问题困扰，Si 2p到底按不按裂分峰处理啊，查手册，Si 2p 1/2并没有Si C O相关的物质啊。 “For your questions, I did note that it is not necessary to use spin-orbit coupling for Si 2p in non-crystalline (inhomogeneous) materials. The clear spin-orbit split is observed in single crystalline silicon, for example. In that case, if the instrumental resolution is not high enough, an asymmetric peak fitting should be used. The papers that cover silicon oxide never use this (although it is nice to comment on why in a paper) because pf inhomogeneous broadening.”问了审稿人，他给解释的，请参考。查看更多
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