多晶硅生长模拟软件Polysim谁用过，效果如何? 这么智能！！！ 可惜没有渠道可以了解到 楼主有这方面的简要介绍吗 大概是类似于哪方面的仿真模拟？可以直观看到生长流程？？？ 我来补充一些： the growth simulation includes modeling of numerous physicochemical processes such as turbulent heat and mass transfer, radiative heat transfer, gas-phase and surface chemical reactions, and electrical heating of the silicon rods. the software employs chemical models involving gas-phase precursor decomposition and interaction and an original surface chemistry model. the approach suggested allows description of the chemical processes at the gas-solid interfaces in a wide range of operating conditions ................. [ ]查看更多
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