进还原炉的TCS中含多少DCS才合适? advancements in the commercial production of polysilicon 这篇文章中有这么一句 although the process is often referred to as the tcs siemens process, as shown in the above reactions, dichlorosilane (dcs) participates in the process and contributes to the making of polysilicon. for this reason, most polysilicon producers choose not to separate dcs from tcs. as a result, the tcs stream usually contains 6% to 9% dcs. 查看更多
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