紧急求助多晶硅化验报告 (请高手指教)? EAG Job Number H09W4698 Bulk Analysis of P in Si Detection limit 5E+13at/cm3 Sample No. P concentration(at/cm3) P concentration(at/cm3) Average Analysis 1 Analysis 2 #1 <5E+13 <5+E13 Bulk Analysis of As in Si Detection limit 5E+13at/cm3 Sample No. As concentration(at/cm3) As concentration(at/cm3) Average Analysis 1 Analysis 2 #1 <5E+13 <5+E13 Bulk Analysis of Sb in Si Detection limit 5E+13at/cm3 Sample No. Sb concentration(at/cm3) Sb concentration(at/cm3) Average Analysis 1 Analysis 2 #1 <5E+13 <5+E13查看更多7个回答 . 4人已关注